Single-crystal hexagonal perovskite YAlO<inf>3</inf> epitaxially on GaAs(111)A and (001) using atomic layer deposition

Cheng, C.K.C.K.ChengYoung, L.B.L.B.YoungLin, K.Y.K.Y.LinLin, Y.H.Y.H.LinWan, H.W.H.W.WanLu, G.J.G.J.LuChang, M.T.M.T.ChangCai, R.F.R.F.CaiLo, S.C.S.C.LoLi, M.Y.M.Y.LiHsu, C.H.C.H.HsuKwo, J.J.KwoMINGHWEI HONGCHIA-KUEN CHENG2019-12-272019-12-272017https://scholars.lib.ntu.edu.tw/handle/123456789/443312Single-crystal hexagonal perovskite YAlO<inf>3</inf> epitaxially on GaAs(111)A and (001) using atomic layer depositionjournal article10.1016/j.mee.2017.04.0482-s2.0-85019190936https://www.scopus.com/inward/record.uri?eid=2-s2.0-85019190936&doi=10.1016%2fj.mee.2017.04.048&partnerID=40&md5=4d03f1f4052f9449c974772a389ca29b