Lin P.CLin K.FChiu CSemenov V.ILin H.CHSIN-CHIH LINMIIN-JANG CHEN2022-03-222022-03-22202102578972https://www.scopus.com/inward/record.uri?eid=2-s2.0-85117807169&doi=10.1016%2fj.surfcoat.2021.127811&partnerID=40&md5=6ced6f88e6e1a9803731acce090183c7https://scholars.lib.ntu.edu.tw/handle/123456789/598376Atomic layer plasma treatment (ALPT) enhances the corrosion protection of the ZrO2 film prepared by thermal-driven ALD mode (TALD-ZrO2) and further reduces the corrosion rate of Mg[sbnd]Ca alloy by more than an order of magnitude. The ALPT effect significantly increases the crystallinity and reduces the oxygen defects of TALD-ZrO2 film. The ALPT time of 30 s has the most increase in the polarization resistance of TALD-ZrO2 film, from 1.8kΩ·cm2 to 74.7kΩ·cm2. The enhancement of corrosion resistance of TALD-ZrO2 film caused by the 30s-ALPT is equivalent to the thickness effect of increasing the thickness from 200 cycles to 300 cycles. ALPT technique is considered as a potential and feasible method to prepare TALD-ZrO2 films with high film quality and excellent corrosion protection. ? 2021 Elsevier B.V.Atomic layer depositionAtomic layer plasma treatmentCorrosion protectionMagnesium-calcium alloyAtomsBinary alloysCalcium alloysCorrosion rateCorrosion resistanceCorrosion resistant alloysCrystallinityMagnesium alloysZirconiaAtomic layerAtomic-layer depositionCristallinityMagnesium-calcium alloysOrders of magnitudePlasma treatmentThermal drivenTreatment effectsZrO 2 filmsPlasma applicationsjournal article10.1016/j.surfcoat.2021.1278112-s2.0-85117807169