Using colloid lithography to fabricate silicon nanopillar arrays on silicon substrates

Chen, J.-K.J.-K.ChenQui, J.-Q.J.-Q.QuiFan, S.-K.S.-K.FanKuo, S.-W.S.-W.KuoKo, F.-H.F.-H.KoChu, C.-W.C.-W.ChuChang, F.-C.F.-C.ChangSHIH-KANG FAN2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-83355162403&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/373124[SDGs]SDG6Using colloid lithography to fabricate silicon nanopillar arrays on silicon substratesjournal article10.1016/j.jcis.2011.10.044