High precision eddy current damped electromagnetic positioner with flexure-suspension.

Lin, Chih-HsienChih-HsienLinHung, Shao-KangShao-KangHungLi, Sang-TsungSang-TsungLiLI-CHEN FU2020-05-042020-05-042009https://scholars.lib.ntu.edu.tw/handle/123456789/489053[SDGs]SDG7High precision eddy current damped electromagnetic positioner with flexure-suspension.conference paper10.1109/CCA.2009.5280935https://doi.org/10.1109/CCA.2009.5280935