蔡振水2006-07-252018-07-052006-07-252018-07-052005-07-31http://ntur.lib.ntu.edu.tw//handle/246246/11241Design, simulation and fabrication of MHz silicon ultrasonic nozzles using multiple Fourier horns and actual atomization and their applications to micro/nano materials technology have been accomplished through the NSC support. Such nozzles possess a number of advantages over conventional metal-based bulk-type ultrasonic nozzles such as MEMS-based micro-fabrication technology for mass production, much higher ultrasonic frequency and thus much smaller drop diameter, much narrower drop-size distribution, and much lower electric drive power requirement. Monodisperse drops 7 μm in diameter were produced by atomization of water and gold colloid solutions using a 3-Fourier horn 0.5 MHz ultrasonic nozzle. The gold nanoparticles (17 to 30 nm in diameter) spray-coated on silicon substrates remain well dispersed.本計畫使用微機電技術在矽晶片研製高頻超音波噴嘴。已經研製成0.5 MHz 多節喇叭型之超音波噴嘴，並且將水等液體及奈米金顆粒分散液 (Gold Colloid Solution or Nanoparticle Dispersion)霧化成功。所得的水滴大小 均勻，90% 以上的水滴直徑為7.0 微米。如此霧化產生之單徑液滴 (Monodisperse Drops) 是國際上之首創。 高頻率超音波噴嘴的核心在於多節喇叭型之共振子(Multiple- Fourier-Horn Resonator)。壓電片所產生之縱向超音波 (Longitudinal Mode) 在共振的條件之下、噴嘴尖端處之振幅將大為提昇。由尖端處流出之液體 因而產生大振幅之微細波 (Capillary Waves)，接著霧化產生均勻液滴。另 外，因為先驅液不需接觸壓電片，故可應用於各種不同先驅液之噴霧熱解 而不影響噴嘴之霧化功能。 除了應用於噴霧熱解以量產奈米級顆粒之外，此類高頻率、低耗電率 之超音波噴嘴亦可研製成醫藥噴霧呼吸模組或應用於蛋白質等生物奈米顆 粒分散液 (Nanoparticles Dispersion) 之噴霧乾燥。application/pdf420542 bytesapplication/pdfzh-TW國立臺灣大學光電工程學研究所ultrasonic nozzlesmultiple-Fourier hornultrasonic atomizationmonodisperse dropsnanoparticlesimpedancelongitudinal vibrationspray pyrolysis陶瓷奈米顆粒噴霧熱解超音波噴嘴奈米顆粒超音波霧化reporthttp://ntur.lib.ntu.edu.tw/bitstream/246246/11241/1/932218E002119.pdf