S. ChattopadhyayL. C. ChenS. C. ChienS. T. LinC. T. WuK. H. Chen2020-06-202020-06-20200200406090https://scholars.lib.ntu.edu.tw/handle/123456789/503928Phase and thickness dependence of thermal diffusivity in a-SiCxNy and a-BCxNyjournal articlehttps://doi.org/10.1016/S0040-6090(02)00747-2