Multi-function thermopile sensors fabricated with a MEMS-compatible process

Sin, L.-M.L.-M.SinPan, T.-T.T.-T.PanTsai, C.-W.C.-W.TsaiChou, C.-F.C.-F.ChouHong, J.-Q.J.-Q.HongTsai, J.-C.J.-C.TsaiJUI-CHE TSAI2018-09-102018-09-102013http://www.scopus.com/inward/record.url?eid=2-s2.0-84877256329&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/379947Multi-function thermopile sensors fabricated with a MEMS-compatible processjournal article10.1109/TSM.2013.2253137