臺灣大學: 化學研究所劉如熹杜怡君Tu, Yi-ChunYi-ChunTu2013-04-112018-07-102013-04-112018-07-102010http://ntur.lib.ntu.edu.tw//handle/246246/257431隨著科技與生活品質快速發展，可攜式3C電子產品趨向輕、薄、短與小，故電池於單位體積及單位重量上須具高能量、高功率與低自放電率之特性，因此發展高潛力之微型化全固態鋰離子二次電池顯得相當重要。全固態薄膜電池具傳統鋰電池無法望其項背之特性，如輕薄、全固態、無漏液問題、溫變性小、可撓曲等優點。近年薄膜電池製造技術逐漸轉為實用化，眾多應用先後提出，包含無線電頻率識別標籤、智能卡、醫療設備、微機電系統、傳感器、軍事、航空等應用。 本研究利用射頻磁控濺鍍法，成功開發全固態式鋰離子薄膜電池，並著重以各種鍍膜製程條件（濺鍍功率、濺鍍壓力與基板溫度）之改變探討對LiPON固態電解質薄膜微結構、成分與電化學特性之影響。LiPON薄膜以交流阻抗儀量測薄膜之離子導電度，並藉X光吸收光譜進行LiPON薄膜之電子結構分析。並同時藉由濺鍍功率、濺鍍氣體分率及退火溫度之改變，建立製作薄膜電池正極材料LiCoO2之最佳條件。觀察所沉積之正極薄膜結構及其電化學特性隨反應條件之變化，亦以X光吸收光譜分析LiCoO2正極材料之電子結構。 本研究最終以最佳鍍膜參數之LiPON固態電解質與LiCoO2正極材料，配合適當之負極材料，組裝全固態鋰離子二次電池，並瞭解其充、放電、循環壽命等元件特性。The size of 3C portable electronic products become lighter, thinner, shorter, and smaller with the rapid development of technology and life, indicating the battery have to exhibit a higher energy and lower self-discharge rate characters. As a result, it is quite important to develop high performance of solid-state lithium ion batteries. The solid-state thin film lithium battery is characteristic of the thin, solid state, no leakage problems, slight temperature variability, flexibility, which are better than that of traditional lithium battery. The variance of microstructure, composition, and electrochemical properties on solid electrolytes were demonstrated under desired sputtering parameters (such as rf power, working pressure, and substrate temperature) in present study. The ionic conductivity of thin film was approached by a.c. impedance measurement. X-ray absorption spectroscopy (XAS) was performed to characterize the electronic structure of LiPON thin film and the effect of O2 fraction on LiCoO2 cathode film. The effect between deposition condition and electrochemical nature were investigated by employing the XAS approach. The optimum LiPON and LiCoO2 thin film were adopted as solid electrolyte and cathode, respectively. All solid-state lithium ion secondary battery was constructed from LiPON and LiCoO2. Thus, the charge/discharge and device property can be clearly verified and studied.7537807 bytesapplication/pdfen-US全固態鋰離子二次電池射頻磁控濺鍍LiPONLiCoO2X光吸收光譜Solid-state lithium ion batteriesLiPON thin filmX-ray absorption spectroscopythesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/257431/1/ntu-99-R97223125-1.pdf