Wei-Ting YangJAKEY BLUEAgnes RoussyJacques PinatonMarco S. Reis2020-03-052020-03-0520191545-59551558-3783https://scholars.lib.ntu.edu.tw/handle/123456789/469954[SDGs]SDG9A Structure Data-Driven Framework for Virtual Metrology Modelingjournal article10.1109/TASE.2019.294104768362311https://doi.org/10.1109/TASE.2019.294104768362311