Improvement in ultrathin rapid thermal oxide uniformity by the control of gas flow

Hong, C.-C.C.-C.HongYen, Y.-R.Y.-R.YenSu, J.-L.J.-L.SuHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102002http://www.scopus.com/inward/record.url?eid=2-s2.0-0036474644&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/296937Improvement in ultrathin rapid thermal oxide uniformity by the control of gas flowjournal article10.1109/66.983449