Opto-mechanical model of surface micromachlned tunable optoelectronic devices

CHIEN-CHUNG LINMartin, Wayne A.Wayne A.MartinHarris, James S.James S.Harris2023-05-292023-05-292001-01-019781557528209https://scholars.lib.ntu.edu.tw/handle/123456789/631478Opto-mechanical model of surface micromachlned tunable optoelectronic devicesconference paper2-s2.0-85136237121https://api.elsevier.com/content/abstract/scopus_id/85136237121