Computational Study of Variations in Gap Size for the Electrostatic Levitating Force of MEMS Device Using Dual BEM

Chyuan, S.W.S.W.ChyuanLiao, Y.S.Y.S.LiaoChen, J.T.J.T.Chen2008-11-262018-06-282008-11-262018-06-282004http://ntur.lib.ntu.edu.tw//handle/246246/86992application/pdf786751 bytesapplication/pdfen-USComputational Study of Variations in Gap Size for the Electrostatic Levitating Force of MEMS Device Using Dual BEMjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/86992/1/34.pdf