Precise optical surface profilometry using innovative chromatic differential confocal microscopy

Chen, L.-C.L.-C.ChenNguyen, D.T.D.T.NguyenChang, Y.-W.Y.-W.ChangLIANG-CHIA CHEN2020-01-132020-01-132016https://scholars.lib.ntu.edu.tw/handle/123456789/447825[SDGs]SDG3[SDGs]SDG9Precise optical surface profilometry using innovative chromatic differential confocal microscopyjournal article10.1364/OL.41.0056602-s2.0-85009399338https://www.scopus.com/inward/record.uri?eid=2-s2.0-85009399338&doi=10.1364%2fOL.41.005660&partnerID=40&md5=9c84bf391476a956aace4f3200b6a48f