Planarization, Fabrication, and Characterization of Three-Dimensional Magnetic Field Sensors

Luong, V.S.V.S.LuongSu, Y.-H.Y.-H.SuLu, C.-C.C.-C.LuJeng, J.-T.J.-T.JengHsu, J.-H.J.-H.HsuLiao, M.-H.M.-H.LiaoWu, J.-C.J.-C.WuLai, M.-H.M.-H.LaiCHING-RAY CHANG2019-12-192019-12-192018https://scholars.lib.ntu.edu.tw/handle/123456789/436472Planarization, Fabrication, and Characterization of Three-Dimensional Magnetic Field Sensorsjournal article10.1109/TNANO.2017.26600622-s2.0-85040738271https://www.scopus.com/inward/record.uri?eid=2-s2.0-85040738271&doi=10.1109%2fTNANO.2017.2660062&partnerID=40&md5=f30cfe38a8424981587112e17bb3b433