Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopy

Wu, J.-W.J.-W.WuHuang, K.-C.K.-C.HuangChiang, M.-L.M.-L.ChiangChen, M.-Y.M.-Y.ChenFu, L.-C.L.-C.FuLI-CHEN FU2018-09-102018-09-102014http://www.scopus.com/inward/record.url?eid=2-s2.0-84894080645&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/387294[SDGs]SDG7Modeling and controller design of a precision hybrid scanner for application in large measurement-range atomic force microscopyjournal article10.1109/TIE.2013.2279352