Ellipsometric study of carbon nitride thin films with and without silicon addition

Chen, L. C.L. C.ChenLin, H. Y.H. Y.LinWong, C. S.C. S.WongChen, K. H.K. H.ChenLin, S. T.S. T.LinYu, Y. C.Y. C.YuWang, C. W.C. W.WangLin, E. K.E. K.LinLing, K. C.K. C.LingSHIANG-TAI LIN2020-01-062020-01-0619990925-9635https://scholars.lib.ntu.edu.tw/handle/123456789/445770Ellipsometric study of carbon nitride thin films with and without silicon additionjournal article10.1016/S0925-9635(98)00281-7WOS:000080437000100