Fabrication of micromachined microwave couplers by CMOS process

Chang, ChienliuChienliuChangChio, JinhongJinhongChioYen, KaihsiangKaihsiangYenChang, PeizenPeizenChangSHEY-SHI LU2018-09-102018-09-101998http://www.scopus.com/inward/record.url?eid=2-s2.0-0032291589&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/341087Fabrication of micromachined microwave couplers by CMOS processconference paper