臺灣大學: 應用力學研究所張家歐; 張簡文添葉幸芳Yeh, Hsing-FangHsing-FangYeh2013-03-212018-06-292013-03-212018-06-292010http://ntur.lib.ntu.edu.tw//handle/246246/250123本論文的目的在於研究低溫石英晶圓(α-Quartz)的蝕刻行為、石英振盪器設計與製程的規劃。利用ㄇ字型蝕刻圖案，來研究石英的蝕刻行為如蝕刻速率、底缺面的米勒指標。藉由各蝕刻面的夾角相互關係，來決定晶格面米勒指標(或方向)；使用二維蝕刻理論，量測蝕刻後的晶格面長度變化率來計算晶格面的蝕刻速率。利用實驗所求得的數據，設計雙端固定式石英振盪器的幾何結構與尺寸，與設計製程上所需的光罩圖形尺寸，使其第一彎曲模態的自然頻率達到35kHz。The purpose of this thesis is to study the etching behavior ofα-quartz. We can decide miller indices of lattice planes of etched quartz by measuring the intersecting angles between lattice planes. Using the two dimensional etch theory and measuring the time rate of length can calculate the etch rates of lattice planes. In this thesis, we also design the geometry and size of double-ended tuning fork quartz resonator such that the nature frequency of the first flexible mode matches the requirement of 35kHz.2963526 bytesapplication/pdfen-US低溫石英二維蝕刻理論米勒指標石英振盪器α-quartztwo dimensional etch theorymiller indicesquartz oscillatorhttp://ntur.lib.ntu.edu.tw/bitstream/246246/250123/1/ntu-99-R97543021-1.pdf