Xu, ChengChengXuChen, Ting-YiTing-YiChenTsai, Chun-PuChun-PuTsaiLi, DongxiaoDongxiaoLiZhou, HongHongZhouWEI-CHANG LILee, ChengkuoChengkuoLee2026-04-142026-04-14202521670013https://www.scopus.com/record/display.uri?eid=2-s2.0-105030258903&origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/737166Three-dimensional (3D) chiral metamaterials are structures with broken out-of-plane symmetry. Among all types of 3D metamaterials, multilayer-stacked metamaterials stand out as they have the potential for large-scale fabrication. In this work, we first demonstrate multilayered chiral metamaterials in mid-infrared regime using a standard CMOS fabrication process. Moreover, we use temporal coupled-mode theory to reveal the relationship between the twisted angle and the far-field coupling coefficient, which is validated both theoretically and experimentally. Leveraging such a platform, we further design a 5×5 array to demonstrate mid-infrared polarization-dependent imaging application.falseChiral metamaterialsCMOS photonicsmid-infrared photonicspolarization controlconference paper10.1109/Transducers61432.2025.111103252-s2.0-105030258903