Polycarbonate nanoparticles spray coated on silicon substrate using micro-electromechanical-systems-based high-frequency ultrasonic nozzle

Song, Yu LinYu LinSongCheng, Chih HsiaoChih HsiaoChengChang, Luh-MaanLuh-MaanChangLee, Chia-FoneChia-FoneLeeChou, Yuan FangYuan FangChou2012-10-312018-06-282012-10-312018-06-282011http://ntur.lib.ntu.edu.tw//handle/246246/244085en-US[SDGs]SDG6Polycarbonate nanoparticles spray coated on silicon substrate using micro-electromechanical-systems-based high-frequency ultrasonic nozzlejournal article10.1016/j.apacoust.2011.06.002http://ntur.lib.ntu.edu.tw/bitstream/246246/244085/-1/157.pdf