Non-planar substrate effect on the interface trap capacitance of metal-oxide-semiconductor structures with ultra thin oxides

JENN-GWO HWU2018-09-102018-09-102012http://www.scopus.com/inward/record.url?eid=2-s2.0-84870908010&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/370335Non-planar substrate effect on the interface trap capacitance of metal-oxide-semiconductor structures with ultra thin oxidesjournal article10.1063/1.4761972