奈米結構智慧型表面對沉積物的預防在微電子冷卻及生物晶片的應用

2011-08-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/691891摘要：近年來，微奈米系統的發展創造了許多以往傳統製造工法所無法達成的契機，卻同時也帶來的因微小化所衍生出的問題。尤其是在微小化同時，單位體積的表面面積相對增加，粒子在表面沉積的數量相對增加，造成的FOULING 現象； FOULING 是一般科學實作上常見的問題，在微小尺度，對微奈米晶片影響更甚，尤其在晶片的冷卻、生醫診斷裝置、以及可植入式裝置上。此計劃書是利用大自然啟發的靈感、來解決沉積物對表面所造成FOULING 問題、並由此減低對能源的耗損。這計畫主要在利用微奈米的技術和對表面科學的知識來研究流體的特性，減低甚至主動去消除沉積物對表面所帶來的問題。在這研究計畫的主要課題是循序漸進的，包含了：（壹）、製造出主動生成並再生奈米結構的表面，（貳）、對表面性質及效能的分析及最佳化，（參）、了解這奈米結構主動再生的機制，以及其可靠度及重複性，（肆）、評估利用此奈米結構再生的表面對生物、非生物、蛋白質沉積的反應，（伍）、利用此奈米表面結構再生的機制，結合微流道系統，成為新一代微流體裝置的制動原理。這種奈米表面結構再生的機制，有以下的特點：(1) 製程容易、(2) 低驅動電壓、(3) 可逆反應、以及(4)良好的生物相容性；可容易地被整合在微奈米晶片中，來消除微小粒子沉積所帶來的問題。<br> Abstract: Although the recent development of MEMS/NEMS has brought numerous advantages, it has also led to a fouling phenomenon, in which particles in fluids easily accumulate on surfaces, due to the increase of surface-to-volume ratio from miniaturization. Fouling greatly affects the device performance and is problematic for various microdevices, such as IC chip cooling, biomedical diagnostic and implantable MEMS devices. Inspired by examples in nature, this proposed research is motivated by the urgent need to reduce fouling and energy loss. Utilizing the MEMS/NEMS techniques and knowledge on interfacial behaviors, this project intends to study fluid flow, prevent and even actively diminish the fouling problem. Research tasks in this exploratory research project have been identified: (1) to synthesize an active nanostructuring polymeric film via dopants, potential and nanocomposite for size and uniformity control, (2) to characterize it from the aspects in metrology, surface energy and fluid behavior, (3) to understand its nanostructuring mechanism and reversibility, (4) to evaluate the anti-fouling performance in microfluidic devices, and (5) to apply it into a MEMS device for fluid manipulation. This polymeric surface, possessing the unique features of easy processing, low actuation voltage, reversible nanostructuring, and excellent biocompatibility, will be able to eliminate the fouling problem and to perform excellent fluidic functions at the microscale.&#63756米結構再生&#63993子沉積fouling表面接觸角親疏水性奈米結構智慧型表面對沉積物的預防在微電子冷卻及生物晶片的應用