Electrical characteristics analysis at "oxide flat-band voltage" for Al-SiO 2-Si capacitor

Lu, H.-W.H.-W.LuChen, T.-Y.T.-Y.ChenHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-79960853269&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/363035Electrical characteristics analysis at "oxide flat-band voltage" for Al-SiO 2-Si capacitorconference paper10.1149/1.3572310