Development of spin coated mesoporous oxide films for MEMS structures

Paik, J.-A.J.-A.PaikFan, S.-K.S.-K.FanChang, H.H.ChangKim, C.-J.C.-J.KimWu, M.C.M.C.WuDunn, B.B.DunnSHIH-KANG FAN2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-17044440110&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/309693Development of spin coated mesoporous oxide films for MEMS structuresjournal article10.1007/s10832-004-5136-5