Nanopatterning on silicon wafers using AFM-based lithography-for solar cells

Lu, H.-H.H.-H.LuCHII-WANN LINHsiao, T.-C.T.-C.HsiaoCHIH-KUNG LEEHsu, S.-M.S.-M.Hsu2020-04-282020-04-282009https://scholars.lib.ntu.edu.tw/handle/123456789/486210Nanopatterning on silicon wafers using AFM-based lithography-for solar cellsconference paper10.1166/jnn.2009.SI082-s2.0-67649200861https://www.scopus.com/inward/record.uri?eid=2-s2.0-67649200861&doi=10.1166%2fjnn.2009.SI08&partnerID=40&md5=5c8ddf1f1270cca71930769fe1f48b62