P-type ZnO:P films fabricated by atomic layer deposition and thermal processing

Shih, Y.T.Y.T.ShihChien, J.F.J.F.ChienChen, M.J.M.J.ChenYang, J.R.J.R.YangJER-REN YANGMIIN-JANG CHEN2020-05-122020-05-122011https://scholars.lib.ntu.edu.tw/handle/123456789/491777P-type ZnO:P films fabricated by atomic layer deposition and thermal processingjournal article10.1149/1.35670192-s2.0-79953206625https://www.scopus.com/inward/record.uri?eid=2-s2.0-79953206625&doi=10.1149%2f1.3567019&partnerID=40&md5=4c67f6dcff662e448477808ff4ff2ad1