Cost-effective and channel-scalable hardware decoders for multiple electron-beam direct-write systems

Chun-Chang YuPei-Chun LinYi-Chang LuCharlie Chung-Ping ChenYI-CHANG LU2019-10-312019-10-31201819325150https://scholars.lib.ntu.edu.tw/handle/123456789/429945Cost-effective and channel-scalable hardware decoders for multiple electron-beam direct-write systemsjournal article10.1117/1.jmm.17.3.0312022-s2.0-85052931469