Local stress determination in shallow trench insulator structures with one side and two sides pad SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization

M. H. LiaoMING-HAN LIAO2021-12-302021-12-302009https://scholars.lib.ntu.edu.tw/handle/123456789/590707Local stress determination in shallow trench insulator structures with one side and two sides pad SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelizationjournal article