A Vertical hall sensor of high sensitivity and excellent confinement fabricated on the (110) silicon substrate

Chiu, H.-W.H.-W.ChiuLu, S.-S.S.-S.LuLan, H.H.LanSHEY-SHI LU2018-09-102018-09-102001http://www.scopus.com/inward/record.url?eid=2-s2.0-0034851837&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/293603A Vertical hall sensor of high sensitivity and excellent confinement fabricated on the (110) silicon substrateconference paper10.1117/12.425332