Metal-density-driven placement for CMP variation and routability

Chen, T.-C.T.-C.ChenCho, M.M.ChoPan, D.Z.D.Z.PanYAO-WEN CHANG2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-56749109565&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/341029Metal-density-driven placement for CMP variation and routabilityjournal article10.1109/TCAD.2008.20061482-s2.0-56749109565WOS:000261310800005