Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noises

Lee, Y.-M.Y.-M.LeeLi, J.-H.J.-H.LiWang, F.-M.F.-M.WangCheng, H.-H.H.-H.ChengShen, Y.-T.Y.-T.ShenTsai, K.-Y.K.-Y.TsaiShieh, J.J.J.J.ShiehKUEN-YU TSAIJIA-HAN LI2020-01-172020-01-172014https://scholars.lib.ntu.edu.tw/handle/123456789/451452Optical scatterometry system for detecting specific line edge roughness of resist gratings subjected to detector noisesjournal article10.1088/2040-8978/16/6/0657062-s2.0-84901999563https://www.scopus.com/inward/record.uri?eid=2-s2.0-84901999563&doi=10.1088%2f2040-8978%2f16%2f6%2f065706&partnerID=40&md5=079b9b94edd70dde79f5825b01f2e071