顏家鈺臺灣大學：機械工程學研究所黃健尹Huang, Jian-YinJian-YinHuang2007-11-282018-06-282007-11-282018-06-282005http://ntur.lib.ntu.edu.tw//handle/246246/60955本文藉由刮掉試片表面提出3維的掃描式探針顯微鏡微影。之前的研究已經證明伺服控制器對微影有重要的影響，一個好的控制器可以得到一個均勻而且更為工整的微影記號。本篇研究利用對於壓電圓管的三維閉迴路控制來達到顯微鏡微影的效果，以各種演算法對於試片做出線、面以及角椎狀的微影加工。本篇研究也指出當連續微影時能夠觀察到許多未預料到的影響，試片表面上的材料受到探針的推擠而上升成犁狀形狀的邊緣，而這些經過加工後的碎削，如果只有經過一次的微影，並不易清除，但若能夠重複微影則可使大量的碎削被帶離加工區域。此外，我們也引入Mu合成控制器，在設計過程我們可以看到其整體的結果表現，實驗結果符合這些設計規格。This paper addresses the three-dimensional scanning probe microscopy (SPM). The previous research has shown that the servo controller imposes significant effect on the lithography. A good controller enables a uniform and precise lithography pattern. This research, as a continuation to the previous work, achieved three-degree-of-freedom control of the SPM PZT driver and was able to scratch various patterns on the sample such as lines, flats and pyramids with different algorithms. This research also demonstrated that many unexpected effect could be observed when conducting continuous marking. The debris piles up on the sides of the plow mark and is very difficult to clean. It is also demonstrated that cleaning the debris by repetitively scratching the surface is possible. In addition, the design procedure for a Mu-synthesis controller is also presented to achieve desired performance. The experimental results confirm the design specifications.Contents Chapter 1 Introduction 1 Chapter 2 The AFM Systems 6 2.1 AFM introduction 6 2.2 Hardware of AFM 7 2.2.1 Principles of AFM 7 2.2.2 Piezoelectric tube 9 2.2.3 Cantilever 12 2.2.4 Position sensitive photo detector (PSPD) 15 2.2.5 Feedback Loop Operation 17 2.2.6 Constant Force Control 19 2.2.7 Constant Height Control 21 2.3 Experimental Hardware and Software 22 Chapter 3 Experiments 28 3.1 System Identification 30 3.2 PID Controller Design and Simulation 40 3.3 Mu Controller Design and Simulation 48 3.3.1 Representing uncertainties 48 3.3.2 Characterize Performance with weighted norms 54 3.3.3 Mu Controller Design and Simulation 58 3.4 Experiment Method 70 Chapter 4 Results 74 4.1 Results of Line Lithography 74 4.2 Results of Plane Lithography 77 4.2.1 Spiral flat： 77 4.2.2 Raster flat： 81 4.3 Results of Pyramid Lithography 85 4.3.1 Spiral Pyramid： 85 4.3.2 Block Pyramid： 89 4.3.3 Double Block Pyramid： 93 4.4 Discussions 97 Chapter 5 Conclusions and Future Works 98 Reference 1003082070 bytesapplication/pdfen-US原子力顯微鏡探針顯微鏡微影Mu合成控制AFMSPM LithographyMu synthesisthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/60955/1/ntu-94-R92522801-1.pdf