Jywe W.-Y.Liu C.-H.Shien W.H.Shyu L.-H.Fang T.-H.Sheu Y.-H.Hsu T.-H.Hsieh C.-C.Wen-Yuh Jywe2022-05-242022-05-242006https://www.scopus.com/inward/record.uri?eid=2-s2.0-33947691137&doi=10.1088%2f1742-6596%2f48%2f1%2f144&partnerID=40&md5=82f41a0892a2c7b4b9e4b4652b1ef089https://scholars.lib.ntu.edu.tw/handle/123456789/611978In this paper, a new measuring system, Multi-Degree of Freedoms Measuring System(MDFMS), is presented. It is integrated a miniature laser interferometer with a DVD pickup and straightness measuring optical system. The five-degrees of freedoms motion errors to simultaneously measure machine tools. And, it reduces the overall time for measuring the geometric errors. The resolution and accuracy of straightness measurement are about 0.3μm and the resolution and accuracy of the angular error measurement are about 0.6arcsecs within the measuring range of 150mm. MDFMS is characteristic by simple set up, low cost, fast measuring and high accuracy for machine tools. ? 2006 IOP Publishing Ltd.[SDGs]SDG16journal article10.1088/1742-6596/48/1/1442-s2.0-33947691137