Young, H.T.H.T.YoungLin, W.Y.W.Y.Lin2011-02-112018-06-282011-02-112018-06-282008-07http://ntur.lib.ntu.edu.tw//handle/246246/222968en-US3D Micro-scale Profile Measuring Systemjournal article10.4028/www.scientific.net/KEM.364-366.394