A novel bottom antireflective coating working for both KrF and ArF excimer laser lithography

Wang, L.A.L.A.WangChen, H.L.H.L.Chen2008-12-312018-06-282008-12-312018-06-282000http://ntur.lib.ntu.edu.tw//handle/246246/95609application/pdf203961 bytesapplication/pdfen-USA novel bottom antireflective coating working for both KrF and ArF excimer laser lithographyjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/95609/1/09.pdf