Fabrication of submicron Si spheres on SOI platform by using excimer laser reformation technique

Hung, S.C.S.C.HungShiu, S.C.S.C.ShiuChao, C.S.C.S.ChaoCHING-FUH LIN2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-84897963541&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350137Fabrication of submicron Si spheres on SOI platform by using excimer laser reformation techniqueconference paper