Electron-Beam Lithographic Method, System and Method For Controlling Electron-Beam Servo (電子束微影方法、電子束微影伺服控制方法及系統)

Jia-Yush YenKuen-Yu TsaiLien-Sheng ChenPablo ChiuHsin-Fan TsaiKUEN-YU TSAI2018-09-102018-09-102014-05http://scholars.lib.ntu.edu.tw/handle/123456789/388670Electron-Beam Lithographic Method, System and Method For Controlling Electron-Beam Servo (電子束微影方法、電子束微影伺服控制方法及系統)patent