Metallization on semiconductors in the single digit nanometer regime

Chang, C.-C.C.-C.ChangLung, C.-H.C.-H.Lung2019-08-012019-08-012006https://www.scopus.com/inward/record.uri?eid=2-s2.0-33749009743&doi=10.1109%2fTNANO.2006.880421&partnerID=40&md5=cbc0fca3187e2ae5cf16bb872bb7f105https://scholars.lib.ntu.edu.tw/handle/123456789/415973Metallization on semiconductors in the single digit nanometer regimejournal article10.1109/TNANO.2006.8804212-s2.0-33749009743