Solving the electrostatic field in large-scale electron-beam direct-write lithography system

Yen?Min LeeJIA-HAN LIKuen?Yu TsaiTony Wen?Hann SheuJia?Yush Yen2022-01-032022-01-032011https://scholars.lib.ntu.edu.tw/handle/123456789/590895Solving the electrostatic field in large-scale electron-beam direct-write lithography systemconference paper