Self-aligned nanocrystalline silicon thin-film transistor with deposited n+ source/drain layer

Cheng, I.-C.I.-C.ChengWagner, S.S.WagnerI-CHUN CHENG2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-41549164030&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/332093Self-aligned nanocrystalline silicon thin-film transistor with deposited n+ source/drain layerconference paper