Post-deposition annealing effect on RF-sputtered TiO <inf>2</inf> thin-film properties for photonic applications

Hadjoub, I.I.HadjoubTouam, T.T.TouamChelouche, A.A.CheloucheAtoui, M.M.AtouiSolard, J.J.SolardChakaroun, M.M.ChakarounFischer, A.A.FischerBoudrioua, A.A.BoudriouaLUNG-HAN PENG2020-06-112020-06-112016https://scholars.lib.ntu.edu.tw/handle/123456789/499524Post-deposition annealing effect on RF-sputtered TiO <inf>2</inf> thin-film properties for photonic applicationsjournal article10.1007/s00339-015-9570-92-s2.0-84955256706https://www.scopus.com/inward/record.uri?eid=2-s2.0-84955256706&doi=10.1007%2fs00339-015-9570-9&partnerID=40&md5=e92abdd577d98697a434f925d9a694b9