Characteristics of low-resistivity aluminum-doped zinc oxide films deposited at room temperature by off-axis radio-frequency sputtering on flexible plastic substrates

LI-MIN WANGWang, Chih-YiChih-YiWangJheng, Ciao-RenCiao-RenJhengWu, Syu-JhanSyu-JhanWuSai, Chen-KaiChen-KaiSaiLee, Ya-JuYa-JuLeeChiang, Ching-YuChing-YuChiangShew, Bor-YuanBor-YuanShew2019-12-272019-12-2720160947-8396https://scholars.lib.ntu.edu.tw/handle/123456789/443257Characteristics of low-resistivity aluminum-doped zinc oxide films deposited at room temperature by off-axis radio-frequency sputtering on flexible plastic substratesjournal article10.1007/s00339-016-0250-1WOS:000380667500017