Tsai, H. J.H. J.TsaiChang, C. C.C. C.ChangJeng, Y. R.Y. R.JengChen, S. L.S. L.ChenSIH-LI CHEN2020-01-132020-01-132006978-0-87849-990-8https://scholars.lib.ntu.edu.tw/handle/123456789/448399The characteristic of abrasive particle in chemical-mechanical polishingbook partWOS:000235279200135