Structural design and analysis of a nano-positioning planar motion stage

JIA-YUSH YEN2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-80052401107&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/362672[SDGs]SDG7Structural design and analysis of a nano-positioning planar motion stageconference paper10.1109/WCICA.2011.59706322-s2.0-80052401107