The real demonstration of High-Quality Carbon Nano-Tubes (CNTs) as the electrical connection for the potential application in a vertical 3D integrated technology

Lu, P.-Y.P.-Y.LuLi, Y.-R.Y.-R.LiYen, C.-M.C.-M.YenHung, H.-T.H.-T.HungKao, C.-R.C.-R.KaoPu, W.-C.W.-C.PuChen, C.-C.A.C.-C.A.ChenLee, M.-H.M.-H.LeeMING-HAN LIAOC. ROBERT KAO2021-02-042021-02-042020https://www.scopus.com/inward/record.url?eid=2-s2.0-85090293636&partnerID=40&md5=354709dce6a2e2fb1bbf6de157def6f9https://scholars.lib.ntu.edu.tw/handle/123456789/547495The real demonstration of High-Quality Carbon Nano-Tubes (CNTs) as the electrical connection for the potential application in a vertical 3D integrated technologyconference paper10.1109/ECTC32862.2020.002472-s2.0-85090293636