Bonding characterization, density measurement, and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin films

S. ChattopadhyayL. C. ChenS. C. ChienS. T. LinK. H. Chen2020-06-202020-06-20200200218979https://scholars.lib.ntu.edu.tw/handle/123456789/503925Bonding characterization, density measurement, and thermal diffusivity studies of amorphous silicon carbon nitride and boron carbon nitride thin filmsjournal articlehttps://doi.org/10.1063/1.1512966