The roles of hydrophobic group on the surface of ultra low dielectric constant porous silica film during thermal treatment

Luo, Jen-TsungJen-TsungLuoWu, Wen-FaWen-FaWuWen, Hua-ChiangHua-ChiangWenWan, Ben-ZuBen-ZuWanChang, Yu-MingYu-MingChangChou, Chang-PinChang-PinChouChen, Jun-MingJun-MingChenChen, Wu-NanWu-NanChen2008-12-172018-06-282008-12-172018-06-282007http://ntur.lib.ntu.edu.tw//handle/246246/92242application/pdf920736 bytesapplication/pdfen-USThe roles of hydrophobic group on the surface of ultra low dielectric constant porous silica film during thermal treatmentjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/92242/1/37.pdf