The fluid property dependency on micro-fluidic characteristics in the deposition process for microfabrication

Chau, S.W.S.W.ChauHsu, K.L.K.L.HsuChen, S.C.S.C.ChenLiou, T.M.T.M.LiouShih, K.C.K.C.ShihSHIU-WU CHAU2020-01-172020-01-172004https://scholars.lib.ntu.edu.tw/handle/123456789/451627The fluid property dependency on micro-fluidic characteristics in the deposition process for microfabricationconference paper10.1016/j.bios.2003.11.0312-s2.0-2342664563https://www.scopus.com/inward/record.uri?eid=2-s2.0-2342664563&doi=10.1016%2fj.bios.2003.11.031&partnerID=40&md5=d39c46a7950c88bdfe5395696759f35a