Lateral nonuniformity of effective oxide charges in MOS capacitors with A12O3 gate dielectrics

Huang, S.-W.S.-W.HuangHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102006http://www.scopus.com/inward/record.url?eid=2-s2.0-33745714970&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/321870Lateral nonuniformity of effective oxide charges in MOS capacitors with A12O3 gate dielectricsjournal article10.1109/TED.2006.875816