Low-temperature crystallization and paraelectric-ferroelectric phase transformation in nanoscale ZrO 2 thin films induced by atomic layer plasma treatment

Yi, S.-H.S.-H.YiHuang, K.-W.K.-W.HuangLin, H.-C.H.-C.LinChen, M.-J.M.-J.ChenHSIN-CHIH LINMIIN-JANG CHEN2021-02-042021-02-042020https://www.scopus.com/inward/record.url?eid=2-s2.0-85082383145&partnerID=40&md5=f256aea82d853abae92451474cf0b390https://scholars.lib.ntu.edu.tw/handle/123456789/546680Low-temperature crystallization and paraelectric-ferroelectric phase transformation in nanoscale ZrO 2 thin films induced by atomic layer plasma treatmentjournal article10.1039/c9tc04801d2-s2.0-85082383145WOS:000528591300004